导入器
2024-09-11
Features:
✓ Continuous rotary motion
✓ Manual or Motorized actuator
✓ Rotary position lock
✓ UHV or HV compatible materials
✓ Welded bellows seal
✓ Bakeable to 200 ºC
✓ CF、ISO-F and KF port mounts
UHV units are bakeable to 200ºC with actuator removed and 30ºC maximum when motorized
Drive Options must be selected with one of the following modules: Manual ;( Default) / Stepper Motor
✓ Continuous rotary motion
✓ Manual or Motorized actuator
✓ Rotary position lock
✓ UHV or HV compatible materials
✓ Welded bellows seal
✓ Bakeable to 200 ºC
✓ CF、ISO-F and KF port mounts
| BODY MATERIAL | Stainless Steel 304L/316L | ||
|---|---|---|---|
| FEEDTHROUGH | Bellows | ||
| STANDARD FLANGES | ISO-KF, ISO-F, CF-F, ASA-LP, JIS | ||
| LEAK RATE | Body | UHV :1x10-11 Torr /HV: 1x10-8 Torr | |
| SPEED | 20 RPM | ||
| Shaft Seal | 316L | ||
| Torque | 9.8N.m max | ||
| TEMPERATURE | Body | ≤ 200 °C UHV | |
| Actuator | ≤ 30 °C | ||
| MATERIAL | Body, Gate | AISI 304 (1.4301) | |
| Bellows | AISI 633 (AM350) | ||
| Manual ;( Default) | |||
| Stepper Motor | |||
UHV units are bakeable to 200ºC with actuator removed and 30ºC maximum when motorized
Drive Options must be selected with one of the following modules: Manual ;( Default) / Stepper Motor
